Semiconductor manufacturing is a rapidly growing and constantly evolving cornerstone industry. But it is also a very harsh environment due to complicated production processes, sophisticated equipment, and fluctuating market demands. With the emerging highly automated wafer fabrication facilities (fabs), there is a compelling trend to promote the interdisciplinary R&D integrating automation with advanced decision technologies (such as Industrial Engineering, Operations Research and Artificial Intelligence).

This technical committee was founded in 2001. It consists of over 200 semiconductor manufacturing researchers and engineers worldwide. It is an excellent forum for sharing ideas through scientific events and publications.

2010 Tech Committee (TC) Meeting Summary

Won the 2005 Most Active Technical Committee Award from IEEE Robotics & Automation Society!

Call for Papers: Automation in Green Technologies regular track at IEEE CASE 2010.

2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference(ASMC), San Francisco, California, July 2010. Our TC chaired a special sesion.

IEEE 6th International Conference on Automation Science and Engineering, Toronto, Canada, August 2010. TC is sponsoring a track on “ Automation in Green Techology”

Special Issue on Equipment and Operations Automation in the Semiconductor Industry, IEEE Transactions on Automation Science and Engineering, schdeduled to appear July 2010. Paper submissions due January 2011.

Call for Papers for the 2009 IEEE Conference on Automation Science and Engineering to be held in Bangalore, India from August 22-25, 2009

10th International Conference on Automation Technology (Automation 2009),Tainan (Taiwan), June 2009. Committee Co-Chairs Meng-Chu Zhou and Mike Tao Zhang are Int’l Advisory Committee members.