Semiconductor manufacturing is a rapidly growing and constantly evolving cornerstone industry. But it is also a very harsh environment due to complicated production processes, sophisticated equipment, and fluctuating market demands. With the emerging highly automated wafer fabrication facilities (fabs), there is a compelling trend to promote the interdisciplinary R&D integrating automation with advanced decision technologies (such as Industrial Engineering, Operations Research and Artificial Intelligence).

This technical committee was founded in 2001. It consists of over 200 semiconductor manufacturing researchers and engineers worldwide. It is an excellent forum for sharing ideas through scientific events and publications.



Won the 2005 Most Active Technical Committee Award from IEEE Robotics & Automation Society!

 2016 Conference Organization

2016 Special Issue Development